H - Electricity – 01 – L
Inventor
H - Electricity
01
L
Inventor
Country: United States Of America
Electrostatically deformable thin silicon membranes
Formation of microstructures by multiple level deep x-ray...
Formation of microstructures using a preformed photoresist...
Formation of microstructures using a preformed photoresist...
Formation of microstructures with removal of liquid by...
Formation of microstructures by multiple level deep x-ray...
Formation of microstructures using a preformed photoresist...
Micromachined differential pressure transducers and method...
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