4. H - Electricity
  5. 05
  6. B

Robert G. Poulsen

H - Electricity – 05 – B

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End point control in plasma etching

H - Electricity – 01 – L
Patent

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Gaseous plasma etching of aluminum and aluminum oxide

B - Operations – Transporting – 23 – K
Patent

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Method of and apparatus for plasma etching

H - Electricity – 05 – B
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Profile ID: LFCA-PAI-P-180510

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