Apparatus for affixing a rotating cylindrical magnetron...

Details Apparatus for affixing a rotating cylindrical magnetron... Apparatus for affixing a rotating cylindrical magnetron...

C - Chemistry, Metallurgy

23

C

C23C 14/35 (2006.01) C23C 14/34 (2006.01) H01J 37/34 (2006.01)

Patent

CA 2235864

An apparatus to releasably affix a rotating cylindrical magnetron target (10) to a spindle (20) utilizes a threaded spindle collar (30) engaging threads (70) on the outside surface of the target (10), with a single water-to-vacuum seal (40) located at the target and spindle interface. The threads (70) may be removable from the target, enabling efficient assembly/disassembly and recycling.

Cet instrument, qui permet de fixer de façon libérable une cible rotative cylindrique de magnétron (10) sur un axe (20), fait appel à une bague filetée d'axe (30) qui entre en prise avec des filets (70) disposés à la surface extérieure de la cible (10), un seul joint d'étanchéité eau-vide (40) étant placé à l'interface cible-axe. On peut retirer les filets (70) de la cible, ce qui permet un montage, un démontage et un recyclage efficaces.

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