Temporary bridge for micro machined structures

Details Temporary bridge for micro machined structures Temporary bridge for micro machined structures

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) G03F 7/00 (2006.01) H01L 21/306 (2006.01) B81B 3/00 (2006.01) G01L 1/00 (2006.01) G01P 15/18 (2006.01)

Patent

CA 2384889

A micro machined structure includes one or more temporary bridges for temporarily coupling the micro machined structure to a support structure.

L'invention concerne une structure micro-usinée comprenant un ou plusieurs ponts provisoires servant à coupler provisoirement cette structure micro-usinée à une structure de support.

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