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Patch production

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Polysilicon microelectronic reflectors and beams and methods...

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Portable etch chamber

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Process for manufacturing micromechanical devices containing...

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Processes for rapid microfabrication using thermoplastics...

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Production method for micro-machine

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Production of diaphragms

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Semi-conductor sensor fabrication

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Staggered vertical comb drive fabrication method

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Temporary bridge for micro machined structures

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Thinning of a si wafer for mems-sensors applications

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Wafer bonding device and wafer bonding method

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