Temperature compensated microelectromechanical structures...
Temporary bridge for micro machined structures
Thermal actuator shaped for more uniform temperature profile
Thermal bend actuator for a micro electro-mechanical device
Thermally actuated microelectromechanical systems including...
Thermally efficient micromachined device
Thermally-activated microchip chemical delivery devices
Thinning of a si wafer for mems-sensors applications
Tiled microelectromechanical device modules and fabrication...
Two-step electrode for mems micromirrors
Vacuum sealed microdevice packaging with getters
Vent in a micro electro-mechanical device
Wafer bonding device and wafer bonding method