Dual position linear displacement micromechanism

Electrical connection through a substrate to a...

Electrical cross-talk shields for mems micromirrors

Electrical microvalve and method of manufacturing thereof

Electrode configuration for piano mems micromirrors

Electromechanical device comprising electronic components...

Electromechanical three-trace junction devices

Electropipettor and compensation means for electrophoretic bias

Electrostatically operated device

Electrostatically operated device

Electrothermally-driven mems microgrippers with integrated...

Embedded control valve using electroactive material

Embedded fluid mixing device using a homopolar motor

Encapsulation process for microelectromechanical structures

Fabrication and use of submicron wide suspended structures

Fabrication of metallic microstructures via exposure of...

Flexible microstructured superhydrophobic materials

Flow switching on a multi-structured microfluidic cd...

Fluid circuit components based upon passive fluid dynamics

Fluidic pumping system