Fluorochemical treatment for silicon articles
Gold thiolate and photochemically functionalized...
Hermatic firewall for mems packaging in flip-chip bonded...
Housing for micromechanical and micro-optic components used...
Hybrid digital and channel microfluidic devices and methods...
Hybrid micropackaging of microdevices
Imaging technique for use with optical mems devices
Implant having mems flow module with movable,...
Improved methods of fabricating microelectromechanical and...
In situ mixing in microchannels
In-plane mems thermal actuator and associated fabrication...
Integrated electrical cross-talk walls for electrostatic mems
Integrated mems packaging
Interferometric modulator array with integrated mems...
Interlaced array of piano mems micromirrors
Laminate microstructure device and method for making same
Liquid discharge head, manufacturing method thereof, and...
Liquid distribution system
Lockable microelectromechanical actuators using...
Managing bubbles in a fluid-ejection device