Single action assembly for out-of-plane mems microstructures

Soft mems

Stamping methods and devices

Structure comprising a getter layer and an adjusting...

Sunken electrode configuration for mems micromirror

System and method for display device with activated desiccant

System and method for display device with end-of-life phenomena

System and method for protecting microelectromechanical...

System and method for protecting microelectromechanical...

System and method of providing a regenerating protective...

System and method of transmitting video data

Temperature compensated microelectromechanical structures...

Thermal actuator shaped for more uniform temperature profile

Thermal bend actuator for a micro electro-mechanical device

Thermally actuated microelectromechanical systems including...

Thermally efficient micromachined device

Thermally-activated microchip chemical delivery devices

Tiled microelectromechanical device modules and fabrication...

Two-step electrode for mems micromirrors

Vacuum sealed microdevice packaging with getters