Method for producing a stamp for hot embossing
Method for producing thin, free-standing layers of solid...
Method of fabricating a suspended microstructure with a...
Method of fabricating sub-micron structures in transparent...
Method of manufacturing a liquid discharge head, liquid...
Methods and apparatus for the electronic, homogeneous...
Methods and apparatus for transporting and positioning...
Methods and systems for providing mems devices with a top...
Methods for fabricating micro-electro-mechanical devices
Methods of forming alpha and beta tantalum films with...
Micro-fabricated shielded conductors
Micro-fixture
Microbridge structures equipped with sloped legs and...
Micromachined element and method of fabrication thereof
Micromechanical component and method for fabricating a...
Micromechanical component and method for fabricating a...
Miniature ultrasound transducer
Nanotube cantilever probes for nanoscale magnetic microscopy
Optical microelectromechanical structure
Packaging micromechanical devices