Micro-electro-mechanical transducers

Micro-electromechanical device, liquid discharge head, and...

Micro-electromechanical devices and methods of manufacture

Micro-electromechanical system switch

Microchip devices for delivery of molecules and methods of...

Microchip for capillary gel electrophoresis and the method...

Microdevice having multilayer structure and method for...

Microdevice with movable microplatform and process for...

Microelectromechanical actuators including driven arched...

Microelectromechanical apparatus with tiltable bodies...

Microelectromechanical component

Microelectromechanical device having single crystalline...

Microelectromechanical device with integrated conductive shield

Microelectromechanical devices

Microelectromechanical devices having brake assemblies...

Microelectromechanical flexible membrane electrostatic valve...

Microelectromechanical systems (mems) device including a...

Microelectromechanical systems including thermally actuated...

Microelectromechanical valve having single crystalline...

Microfabricated devices for the delivery of molecules into a...