Movement sensor in a micro electro-mechanical device

Multi-dimensional scalable displacement enabled...

Multi-port monolithic rf mems switches and switch matrices

Multi-stable micro electromechanical switches and methods of...

Multiple channel magnetostrictive micropump

Nanotube-based switching elements with multiple controls and...

Non-volatile mems micro-relays using magnetic actuators

Oscillating micro-mechanical sensor of angular velocity

Photo-sensitive mems structure

Piano mems micromirror

Piano mems with hidden hinge

Procedure for manufacturing a microelectromechanical optical...

Process for fabricating a micro-electro-mechanical system...

Process for fabricating a microfluidic device

Production of microfluidic devices using laser-induced...

Radiation sensor, wafer, sensor module, and method for the...

Sample handling device

Sealed wafer packaging of microelectromechanical systems

Semiconductor device

Sensor for microfluid handling system