Method and apparatus for control of fluid temperature and flow

Method and apparatus for controlled manufacturing of...

Method and apparatus for localized bonding

Method and apparatus for reducing surface defects in...

Method and device for packaging a substrate

Method and device for protecting interferometric modulators...

Method and device for secure, insulated and electrically...

Method and structure for microfluidic flow guiding

Method and system for packaging a display

Method and system for packaging a mems device

Method and system for packaging mems devices with...

Method and system for providing mems device package with...

Method and system for sealing a substrate

Method and system for xenon fluoride etching with enhanced...

Method for attaching a micromechanical device to a manifold,...

Method for controlling the hermeticity of a closed cavity of...

Method for fabricating micro-structures with various surface...

Method for forming a microstructure from a monocrystalline...

Method for functionalising the wall of a pore

Method for making microchannels on a substrate, and...