Multi-stable micro electromechanical switches and methods of...

Multiple channel magnetostrictive micropump

Nanotube cantilever probes for nanoscale magnetic microscopy

Nanotube-based switching elements with multiple controls and...

Non-volatile mems micro-relays using magnetic actuators

Optical microelectromechanical structure

Oscillating micro-mechanical sensor of angular velocity

Packaging micromechanical devices

Patch production

Photo-sensitive mems structure

Piano mems micromirror

Piano mems with hidden hinge

Polysilicon microelectronic reflectors and beams and methods...

Portable etch chamber

Procedure for manufacturing a microelectromechanical optical...

Process for fabricating a micro-electro-mechanical system...

Process for fabricating a microfluidic device

Process for manufacturing micromechanical devices containing...

Processes for rapid microfabrication using thermoplastics...

Production method for micro-machine