Mems actuators and switches

Mems based rf components with vertical motion and...

Mems bubble generator for large stable vapor bubbles

Mems device with independent rotation in two axes of rotation

Mems devices having support structures and methods of...

Mems magnetically actuated switches and associated switching...

Mems microswitch having a conductive mechanical stop

Mems microswitch having a dual actuator and shared gate

Mems switch with improved standoff voltage control

Metal mems devices and methods of making same

Method and apparatus for continuous liquid flow in...

Method and apparatus for control of fluid temperature and flow

Method and apparatus for controlled manufacturing of...

Method and device for packaging a substrate

Method and device for protecting interferometric modulators...

Method and device for secure, insulated and electrically...

Method and structure for microfluidic flow guiding

Method and system for packaging a display

Method and system for packaging a mems device

Method and system for packaging mems devices with...