Method for manufacturing carbon nanotubes as functional...

Method for manufacturing microstructures having multiple...

Method for packaging semiconductors at a wafer level

Method for producing a packaged integrated circuit with a...

Method for producing a product having a structured surface

Method for producing a stamp for hot embossing

Method for producing thin, free-standing layers of solid...

Method for the production of a component, and component

Method for the production of a microstructure comprising a...

Method of and apparatus for sealing a hermetic lid to a...

Method of fabricating a suspended microstructure with a...

Method of fabricating nanochannels and nanochannels thus...

Method of fabricating sub-micron structures in transparent...

Method of manufacturing a liquid discharge head, liquid...

Method of manufacturing mems devices providing air gap control

Method, apparatus and article for microfluidic control via...

Methods and apparatus for actuating displays

Methods and apparatus for high-shear mixing and reacting of...

Methods and apparatus for spatial light modulation

Methods and apparatus for the electronic, homogeneous...