Method and apparatus for controlled manufacturing of...

Method and apparatus for localized bonding

Method and apparatus for reducing surface defects in...

Method and device for packaging a substrate

Method and device for protecting interferometric modulators...

Method and device for secure, insulated and electrically...

Method and structure for microfluidic flow guiding

Method and system for packaging a display

Method and system for packaging a mems device

Method and system for packaging mems devices with...

Method and system for providing mems device package with...

Method and system for sealing a substrate

Method and system for xenon fluoride etching with enhanced...

Method for attaching a micromechanical device to a manifold,...

Method for controlling the hermeticity of a closed cavity of...

Method for fabricating micro-structures with various surface...

Method for forming a microstructure from a monocrystalline...

Method for functionalising the wall of a pore

Method for making microchannels on a substrate, and...

Method for manufacturing carbon nanotubes as functional...