Hybrid micropackaging of microdevices

Integrated electrical cross-talk walls for electrostatic mems

Measurement and apparatus for electrical measurement of...

Mems device with integrated via and spacer

Mems-based micro and nano grippers with two-axis force sensors

Mems-based nanomanipulators/nanopositioners

Mems-based nanopositioners and nanomanipulators

Merged-mask micro-machining process

Method and apparatus for localized bonding

Method and apparatus for reducing surface defects in...

Method and system for xenon fluoride etching with enhanced...

Method for attaching a micromechanical device to a manifold,...

Method for controlling the hermeticity of a closed cavity of...

Method for fabricating micro-structures with various surface...

Method for forming a microstructure from a monocrystalline...

Method for functionalising the wall of a pore

Method for making microchannels on a substrate, and...

Method for manufacturing carbon nanotubes as functional...

Method for packaging semiconductors at a wafer level

Method for producing a product having a structured surface